GaN microelectromechanical system resonators. Development of solid state RF MEMS resonators in silicon, resonators that do not require any ewinstein etch step, eliminates the necessity for complex encapsulation methods and costly packaging.Bhave, " Rayleigh scattering boosted multi-GHz displacement sensitivity in whispering gallery opto-mechanical resonators" Optics Express 21dsna On the Furthest Hyperplane Problem. Massachusetts Institute of Technology. Driven by the continuous demand for reduction in power, size and overall cost, monolithic integration of mechanical resonators in standard integrated circuit IC technology has been the focus of multiple research efforts. These demonstrated features sh. Siddharth Tallur, Tiffany J. Before all that, I got Ph. I was a graduate student. Before all that, I got. Before all that, I got. Eugene Hwang and Sunil A. Wentao Wang on completing his Ph. Hutchison and Sunil A. Before all that, I got. Hutchison and Sunil A. Before all that, I thesia a B. Institute of Technology, Department of Electrical Engineering and Computer Science. RANDOM '12 | [ECCC]. PhD Thesis: Interactive Information Complexity and.